All Air Inc. - Electronic and Pneumatic Motion Control Products - 1-800-4-AllAir

PI
Physik Instrument

PI is a leading manufacturer of precision motion systems -- Linear Stages, Microscope Stages, Motor Controllers, Piezo Flexure Stages, Piezo Nanopositioning Systems, Piezo Ceramic Motors and Hexapod 6-Axis Stages -- for photonics, bio-nanotechnology, medical device & semiconductor applications.

How Piezo Nanopositioning Systems Work


P-882 – P-888 PICMA® High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)

Product Image -  PICMA High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)
  • Award-Winning Ceramic-Encapsulation PZT Technology
  • Low Operating Voltage
  • Superior Lifetime Even Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nanometer Resolution

PL022 · PL033 · PL055 PICMA® Chip Monolithic Multilayer Piezo Actuators (LVPZT)

PICMA Chip Monolithic Multilayer Piezo Actuators (LVPZT)
  • Award-Winning Ceramic-Encapsulation PZT Technology
  • Ceramic Encapsulation for Extended Lifetime
  • Ultra-Compact, from 2 x 2 x 2 mm
  • High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime

P-871 Closed-Loop, High-Deflection PICMA® Multilayer Piezo Bender Actuators (LVPZT)

Product Image - Closed-Loop, High-Deflection PICMA Multilayer Piezo Bender Actuators (LVPZT)
  • Closed - Loop Operation for Superior Accuracy
  • Nanometer-Range Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Operating Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available

P-007 – P-056 PICA™ Stack Piezoceramic Actuators - Versatile Piezoelectric Power (HVPZT)

Product Image - PICA-Thru Piezo Stack Actuators with Aperture (HVPZT)
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >109 Cycles
  • Proven and Flexible Design
  • Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions

P-010.xxP – P-056.xxP PICA™-Power High-Level Dynamics Piezo Actuators(HVPZT)

Product Image - PICA-Power High-Level Dynamics Piezo Actuators (HVPZT)
  • Operating Temperature to 150°C
  • Temperature Sensor PT1000 Applied
  • High Load Capacity to 80 kN
  • Large Cross-Sections to 56 mm Diameter
  • Extrem Reliability >109Cycles
  • Sub-Nanometer Resolution / Sub-Millisecond Settling Time
  • Ultra-High-Vacuum-Compatible Versions to 10-9 hPa
  • Non-Magnetic Versions

P-010.xxH · P-016.xxH · P-025.xxH PICA™ Thru Piezo Stack Actuators with Aperture (HVPZT)

Product Image - PICA-Thru Piezo Stack Actuators with Aperture (HVPZT)
  • Clear Aperture for Transmitted-Light Applications
  • Large Cross-Sections Available to 56 mm Diameter
  • Variety of Shapes and Options
  • Extreme Reliability >109Cycles
  • Proven and Flexible Design
  • Sub-Nanometer Resolution / Sub-Millisecond Settling-Time
  • Vacuum Compatible and Nonmagnetic Versions

P-810 · P-830 High-Resolution Linear Actuators

Product Image - Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • Travel Range to 60 Micron
  • Pushing Forces to 1000 N
  • Pulling Forces to 5 N
  • Sub-ms Response
  • Sub-Nanometer Resolution

P-842 · P-843 · P-844 · P-845 Preloaded Closed- and Open-Loop Piezo Actuators (LVPZT)

Product Image - Preloaded Piezo Actuators (LVPZT) with Sensor Option
  • Travel Range to 90 Micron
  • Pushing Forces to 3000 N
  • Preloaded for Pulling Forces to 700 N
  • Sub-ms Response
  • Sub-Nanometer Resolution
  • Options: Vacuum Versions, Water-Resistant Case

P-225 · P-235 Preloaded Open- and Closed-Loop High-Load Piezo Actuators (HVPZT)

Product Image - Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • Extremely High Stiffness
  • Pushing Forces to 30,000 N
  • Pulling Forces to 3500 N
  • Travel Range to 180 Micron
  • Options: Versions for Vacuum, High- and Low-Temperatures and with Water-Resistant Case

E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel

E-709 Digital Piezo Motion  Controller for Nanopositioning
  • Flexibility of Digital Signal Processing and Control for the Cost of Analog
  • Digital Motion Control Algorithms with 10 kHz Sampling Rate
  • For Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
  • Linearity to 0.02%
  • USB and RS-232 Interfaces
  • Fast 25 Mbit/s Serial Interface
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Analog Output, e.g. for External Amplifiers
  • Low-Cost OEM-Versions Available
  • Fast Digital Controller, Software-Configurable Servo Parameters
  • Parameter Input Using Software

E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel

E-753 Digital Piezo Motion  Controller for Nanopositioning
  • Next Generation Digital Motion Controller for Nano Positionning Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors

E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format

E-761 PCI Bus Digital Piezo Motion  Controller for Nanopositioning
  • For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
  • High-Speed PCI Interface
  • Additional High-Bandwidth Analog Interface
  • 32-Bit Digital Filters
  • 24-Bit DAC Resolution
  • 2 Linearization Systems
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • ID-Chip Support for Automatic Calibration
  • Integrated Linear Amplifiers
  • Extensive Software Package

E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems

Multi-Channel Digital Piezo Motion Controllers with Dynamic Linearization
  • Precision Motion Control for Nano Positioning Systems with Capacitive Sensors
  • 3-Channel Version
  • Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
  • Communication via Ethernet, USB, RS-232
  • 4th Order Polynomial Linearization for Mechanics & Electronics
  • Dynamic Digital Linearization (DDL) Option for Improved Path Accuracy
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Optional High-Speed Parallel I/O Interface
  • Flexible Wave Generators
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support

E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization

Multi-Channel Digital Piezo Motion Controllers with Dynamic Linearization for Nano Positioning
  • Precision Motion Control for Piezo Nano Positioning Systems with Capacitive Feedback Sensors
  • 3-, 4- & 6-Channel Versions
  • 32-Bit Digital Filters
  • Hardware and Firmware Linearization
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
  • ID Chip Support for Automatic Calibration
  • Optional High-Speed Parallel I/O or DSP Interface
  • Optional Analog Input
  • Integrated Linear Amplifiers
  • GCS (General Command Set) Compatible

E-712 Modular Digital Piezo Motion Controller, up to 6 Axes

Modular Digital Piezo Motion Controller System, for Nano Positioning
  • Digital Motion Controller of the Latest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
  • Highly Stable 20-bit D/A Converters
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
  • Flexible Interfacing: USB, RS-232 & Ethernet
  • Optional High-Bandwidth Analog Inputs and Outputs

E-664 NanoCube® Piezo Controller

NanoCube Piezo Motion Controller
  • 3 x 14 W Peak Power
  • Closed-Loop Precision Motion Control
  • For P-611 NanoCube® Nano Positioning XYZ Stages

E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller

NanoCube Piezo Motion Controller Card for F-206 / C-880 Controller
  • Specially Designed for P-611 NanoCube®and F-206 HexAlign 6D Alignment System
  • Built-in Optical Metrology for Automatic Alignment
  • Integrated Linear Amplifiers with 3 x 9 W Peak Power
  • Closed-Loop Precision Motion Control

E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery

High-Power High Voltage Piezo Amplifier / Motion Controller with Energy Recovery
  • High-Voltage Amplifier with 2000 W Peak Power
  • Energy Recovery
  • Output Voltage 0 to ±1000 V and bipolar
  • Optional Position Servo-Motion Controller Module
  • Optional Computer Interface and Display Module
  • Differential Output

E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers

High-Power, Modular High Voltage Piezo Drivers / Motion Controllers
  • Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
  • Output Voltage -3 to -1100 V & Bipolar
  • 1- and 2-Channel Versions
  • Optional Position Servo-Motion Control Modules
  • Optional RS-232 & IEEE 488 Interface Module & Display

E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators

Piezo Motion Controller for Closed-Loop Low-Voltage Piezo Multilayer Bender Actuators
  • Controller for Closed-Loop Multilayer Bimorph Actuators
  • 1- and 2-Channel Versions
  • Integrated Linear Amplifiers
  • Bench-Top & OEM-Board Versions

E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems

Low-Voltage Piezo  Driver & Position Servo-Motion Controller Modules, OEM Version
  • Open-Loop and Closed-Loop Versions
  • Most Cost-Efficient Digital Piezo Motion Controller
  • Servo Tuning and Parameter Setting by Software
  • Digital Algorithms Improve Linearity
  • Analog Control Input for Target Values

E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

Low-Voltage Piezo Piezo Driver & Servo-Motion Controller Module with High-Speed RS-232 Interface
  • 24-Bit USB Interface and High-Speed Analog Interface
  • Notch Filters for Higher Bandwidth
  • Networking for up to 12 Motion Controllers
  • Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
  • Table for User-Defined Curves

E-831 OEM Piezo Driver and Power Supply Modules

OEM Piezo Driver and Power Supply Modules
  • Cost Effective Piezo Driver
  • Small Size
  • Low Noise, High Stability
  • Easy-to-Use
  • Full Overcurrent, Short-Circuit and Temperature Protection
  • Power-up/down Without Voltage Spikes

E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

Sensor & Position Servo-Motion Control Modules for Piezo-Driven Nanopositioning Systems
  • Modular Piezo Controller System with many Options
  • For High Power Amps to 280 Watts
  • Up to 6 Channels
  • Choice of Linear Amplifier Modules, Low & High Voltage
  • Optional Servo-Motion Controller for Cap Sensors, Strain Sensors and Piezo Resistive Sensors
  • Optional USB Interface, TCP/IP, RS-232
  • Optional Display Module

E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems

Sensor & Position Servo-Motion Control Modules for Piezo-Driven Nanopositioning Systems
  • Position Servo-Control for Piezo-Driven Nano Positioning Systems
  • Improves Linearity
  • Eliminates Drift & Hysteresis
  • For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
  • Increases Piezo Stiffness
  • Notch Filter for Improved Dynamics

E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels

Low  Voltage Piezo Driver Module, 3 Channels
  • Integrated Linear Piezo Amplifiers, 3 x 14 W Peak Power
  • Output Voltage Range -20 to +120 V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100V

E-505 Piezo Amplifier Module High Power Controller

E-505
  • 200 W Peak Power
  • Output Voltage Range -20 to 120 V
  • Module for E-500 Piezo Controller Rack
  • Prepared for Position Servo-Motion Control Upgrade (optional)
  • Prepared for Interfaces / Display Modules (optional)

E-536 PicoCube® Piezo Controller

PicoCube® Piezo Motion Controller
  • Extremely Low Noise: Resolution to 25 Picometers
  • For P-363 PicoCube® Systems
  • Peak Power 3 x 100 W
  • Ultra-Low Noise
  • Output Voltage ±250 V

E-709 Low-Cost Digital Piezo Motion Controller, 1 Channel

E-709
  • Flexibility of Digital Signal Processing for the Cost of Analog
  • Digital Closed-Loop Precision Motion Control Algorithms with 10 kHz Sampling Rate
  • For Nano Positioning Systems with Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
  • Linearity to 0.02%
  • USB and RS-232 Interfaces
  • Fast 25 Mbit/s Serial Interface
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Analog Output, e.g. for External Amplifiers
  • Low-Cost OEM-Versions Available
  • Fast Digital Controller, Software-Configurable Servo Parameters
  • Parameter Input Using Software

E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

Low-Voltage Piezo Piezo Driver & Servo-Motion Controller Module with High-Speed RS-232 Interface
  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • 24-Bit USB Interface and High-Speed Analog Interface
  • Notch Filters for Higher Bandwidth
  • Networking for up to 12 Controllers
  • Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
  • Table for User-Defined Curves

E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version

LVPZT Piezo Driver & Position Servo-Motion Controller Modules, OEM Version
  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Open-Loop Version Available (lower Cost)
  • For Piezo Nano Positioners with Capacitive & Strain Gauge Sensors
  • Integrated Linear Amplifier, 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC)

E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Low Voltage Piezo Driver / Servo-Motion Controller with Fast RS-232 Interface
  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Integrated Linear Piezo Driver with 36 W Peak Power
  • For Piezo Sytems with SGS and Capacitive Sensor Feedback
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified

E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Compact LVPZT Piezo Amplifier & Servo-Motion Controller with High-Speed RS-232 Interface Interface
  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Integrated Linear Piezo Driver, 14 W Peak Power
  • Network Capability with up to 4 Channels
  • For Piezo Systems with Capacitive and Strain Gauge Position Feedback Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible

E-753 High-Speed Digital Piezo NanoAutomation® Controller

High-Speed Digital Piezo NanoAutomation Motion Controller
  • Next Generation Digital Piezo Motion Controller Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Automatic Calibration Data Coaching from Stage ID-Chip
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Triggering Tasks
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors

E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

High-Speed Digital Piezo NanoAutomation Controller
  • For NEXACT® Piezo Motor Drives and Nano Positioning Systems
  • Complete System with Controller, Integrated Power Amplifiers and Software
  • Open-Loop Operation, or Closed-Loop with Linear Encoder
  • High Performance at Low Cost
  • Daisy-Chain Networking for Multi-Axis Operation
  • Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
  • I/O for Automation, Joystick for Manual Operation
  • Parameter Changes On-the-Fly

E-530 Piezo Power Supply Accessories

Power Supply for E-500 Systems
  • Included in E-500 Chassis
  • Provides Power for all E-500-Installable Modules
  • 90-264 VAC Operating Range

N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper

Linear Actuator
  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

E-709: Affordable High Performance Digital Piezo Controller

Affordable High Performance Digital Piezo Controller
  • F^3 Capablility: Fast Focus & Freeze
  • Choice of Sensors: Piezoresistive (lower cost) or capacitive (higher performance)
  • 5th order polynomial digital linearization ensures accuracy.
  • Two notch filters facilitate crisp, high-gain actuation.
  • High Speed servo update rate ensures responsiveness.
  • DAC-in-the-loop architecture guarantees positional stability.
  • Host of fast interfaces including USB, RS-232, Real Time Analog and TTL interfaces.
  • Easy-to-use setup software requires no physical access to the unit. No trimpots!
  • Extensive, well-documented, interface-independent software support includes Windows .dll, Linux .so, and LabVIEW .llbs
  • Broad, robust waveform generation, data-recording and triggering capabilities come standard.

E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Compact LVPZT Piezo Amplifier
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 4 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible

E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Piezo Amplifier
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Piezo Driver with 36 W Peak Power
  • SGS, LVDT and Capacitive Sensor Servo-Control
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified

E-761 Digital Piezo Controller

Digital Piezo Controller
  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking

M-126 Translation Stages with Crossed Roller Bearings

Translation Stages with Crossed Roller Bearings
  • To 25 mm Travel Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micron Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches

M-227 High-Resolution DC-Mike Actuators

High-Resolution DC-Mike Actuators
  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours MTBF

M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators

High-Resolution Closed-Loop DC-Mike & Stepper Actuators
  • 10 & 25 mm Travel Range
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB

M-231 High-Resolution Closed-Loop DC-Mike Actuators

High-Resolution Closed-Loop DC-Mike Actuators
  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator

Compact, High-Resolution, Closed-Loop DC-Mike Actuator
  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators

Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
  • 20 mm or 50 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions

M-238 Heavy-Duty DC-Mike Actuators

Differential Micrometer Drives
  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50 mm
  • Minimum Incremental Motion to 0.3 Micron
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa

M-168 High-Resolution Stepper-Mike Actuators

High-Resolution Stepper-Mike Actuators
  • 10, 25 & 50 mm Travel Ranges
  • Resolution <0.1 Micron
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Resolution with Optional PZT Actuator
  • >5,000 Hours MTBF

P-620.1 - P-629.1 PIHera® Miniature Long-Range Piezo-Stage Nanopositioning System with Direct Metrology

PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

P-603 PiezoMove® Linear Actuator: Low-cost and with Large Travel Ranges

PiezoMove High-Precision Lever Amplified with Flexure Guiding
  • Frictionless, High-Precision Flexure Guiding System
  • Travel Ranges to 500 µm
  • Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible

P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems

Compact Z and XZ Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models

P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems

Compact X and XY Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available

P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System

NanoCube XYZ Piezo Nanopositioning Systems
  • 100 x 100 x 100 Micron Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers